One-step transfer printing of patterned nanogap electrodes

Saller, Kai B.; Riedl, Hubert; Lugli, Paolo; Koblmuller, Gregor und Tornow, Marc (2019): One-step transfer printing of patterned nanogap electrodes. In: Journal of Vacuum Science & Technology B, Bd. 37, Nr. 4, 040602

Abstract

Direct printing of nanogap-separated metallic contact pairs is described that enables novel nanoelectronic device architectures. Nanotransfer printing (nTP) stamps are grown by molecular beam epitaxy involving layered III-V semiconductors that are selectively etched. Finished stamps comprise both the nanoscale surface trench that becomes the nanogap on printing and a microscale, predetermined geometry that affords the simultaneous integration of contact pads for external electrical testing. This nTP technique is well suited for top-contacting sensitive thin films for electrical characterization;a typical electrode configuration is illustrated by transfer-printed 13 nm thin metal films that are separated by an electrically insulating gap of ca. 30 nm.

• Dokumententyp: Zeitschriftenartikel
• Fakultätsübergreifende Einrichtungen: Center for NanoScience (CENS)
• Themengebiete: 500 Naturwissenschaften und Mathematik > 500 Naturwissenschaften
• ISSN: 2166-2746
• Sprache: Englisch