Comparison of magnetron sputtering and ion beam sputtering on dispersive mirrors

Chen, Y.; Hahner, D.; Trubetskov, M.; Schrameyer, S.; Sakiew, W.; Starke, K. und Pervak, V (2020): Comparison of magnetron sputtering and ion beam sputtering on dispersive mirrors. In: Applied Physics B-Lasers and Optics, Bd. 126, Nr. 5, 82

Abstract

We have compared two kinds of dispersive mirrors (DMs) produced by magnetron sputtering and ion beam sputtering. One of them is a broadband DM which is known as double-angle DM, providing a group delay dispersion (GDD) of -40fs2 in the range of 550-1050 nm. The other one is a robust highly dispersive mirror, which provides a GDD of about -275fs2 at 800 nm and covers the wavelength range from 690 to 890 nm. For the first time, a comparison between magnetron-sputtering-produced and ion-beam-sputtering-produced dispersive mirrors is performed.

• Dokumententyp: Zeitschriftenartikel
• Fakultät: Physik
• Themengebiete: 500 Naturwissenschaften und Mathematik > 530 Physik
• ISSN: 0946-2171
• Sprache: Englisch