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Martin, J. A. and Aumann, C. E. and Savage, D. E. and Tringides, Michael C. and Lagally, Max G. and Moritz, Wolfgang and Kretschmar, F. (1987): Atomic steps on Si(100) surfaces. In: Journal of Vacuum Science & Technology A, Vol. 5, No. 4: pp. 615-618




It is demonstrated that surface-sensitive electron diffraction measurements of steps on singular, but rough Si(100) surfaces are subject to a multiple-scattering effect that can be misinterpreted as double-atomic-height steps. It is shown that only single-height steps are present. This phenomenon can occur in any surface in which adjacent terraces have different terrace structure factors. Determination of terrace sizes can be influenced; however, they can be accurately made if the diffraction geometry is chosen appropriately. Possible terrace shape effects may also be inherent in the diffraction data.